Invention Grant
US09087740B2 Fabrication of lithographic image fields using a proximity stitch metrology
有权
使用邻近针迹计量法制作平版印刷图像场
- Patent Title: Fabrication of lithographic image fields using a proximity stitch metrology
- Patent Title (中): 使用邻近针迹计量法制作平版印刷图像场
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Application No.: US14100297Application Date: 2013-12-09
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Publication No.: US09087740B2Publication Date: 2015-07-21
- Inventor: Christopher P. Ausschnitt , Jaime D. Morillo , Roger J. Yerdon
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Keivan Razavi; Yuanmin Cai
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L21/66

Abstract:
A method of determining stitching errors in multiple lithographically exposed fields on a semiconductor layer during a semiconductor manufacturing process is provided. The method may include receiving a predetermined design distance corresponding to a plurality of petals associated with the multiple lithographically exposed fields and identifying a blossom within a single field-of-view (FOV) of a metrology tool, where the blossom is formed by a non-overlapping abutment of corners corresponding to the multiple lithographically exposed fields. The blossom may include the plurality of petals associated with the multiple lithographically exposed fields. Petal position errors may then be calculated based on both a coordinate position for each of the plurality of petals within the blossom and the predetermined design distance, whereby the calculated petal position errors are indicative of stitching errors for the multiple lithographically exposed fields.
Public/Granted literature
- US20150162249A1 FABRICATION OF LITHOGRAPHIC IMAGE FIELDS USING A PROXIMITY STITCH METROLOGY Public/Granted day:2015-06-11
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