Invention Grant
US09087805B2 Semiconductor test and monitoring structure to detect boundaries of safe effective modulus
有权
半导体测试和监测结构,以检测安全有效模量的边界
- Patent Title: Semiconductor test and monitoring structure to detect boundaries of safe effective modulus
- Patent Title (中): 半导体测试和监测结构,以检测安全有效模量的边界
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Application No.: US14524637Application Date: 2014-10-27
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Publication No.: US09087805B2Publication Date: 2015-07-21
- Inventor: James V. Crain, Jr. , Mark C. H. Lamorey , Christopher D. Muzzy , Thomas M. Shaw , David B. Stone
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01R31/26 ; H01L23/522 ; H01L23/00

Abstract:
A method of testing an integrated circuit (IC) chip and a related test structure are disclosed. A test structure includes a monitor chain proximate to at least one solder bump pad, the monitor chain including at least one metal via stack, each metal via stack extending from a lower metal layer in the IC chip to an upper metal layer in the IC chip, such that the monitor chain forms a continuous circuit proximate to the at least one solder bump pad, and where each metal via stack is positioned substantially under the solder bump. A method for testing to detect boundaries of safe effective modulus includes performing a stress test on an IC chip containing the test structure joined to a semiconductor package.
Public/Granted literature
- US20150044787A1 SEMICONDUCTOR TEST AND MONITORING STRUCTURE TO DETECT BOUNDARIES OF SAFE EFFECTIVE MODULUS Public/Granted day:2015-02-12
Information query
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