Invention Grant
- Patent Title: Self-correcting power grid for semiconductor structures method
- Patent Title (中): 半导体结构自校正电网法
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Application No.: US14065777Application Date: 2013-10-29
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Publication No.: US09087841B2Publication Date: 2015-07-21
- Inventor: Cathryn J. Christiansen , Andrew H. Norfleet , Kirk D. Peterson , Andrew A. Turner
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/525 ; H01L21/66

Abstract:
Aspects of the present invention relate to a self-correcting power grid for a semiconductor structure and a method of using thereof. Various embodiments include a self-correcting power grid for a semiconductor structure. The power grid may include a plurality of interconnect layers. Each of the plurality of interconnect layers may include a plurality of metal lines, where each of the plurality of metal lines are positioned substantially parallel to one another and substantially perpendicular to a plurality of distinct metal lines in adjacent interconnect layers. Additionally the interconnect layers may include a plurality of fuses formed within each of the metal lines of the plurality of interconnect layers. In the power grid, at least one of the fuses positioned immediately adjacent to a defect included in the power grid may be configured to blow during a testing process to isolate the defect.
Public/Granted literature
- US20150115400A1 SELF-CORRECTING POWER GRID FOR SEMICONDUCTOR STRUCTURES METHOD Public/Granted day:2015-04-30
Information query
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