Invention Grant
US09087867B2 Clam shell two-pin wafer holder for metal plating 有权
蛤壳式双针晶圆座用于金属电镀

Clam shell two-pin wafer holder for metal plating
Abstract:
A clam shell wafer holder includes a base and a lid pivotally connected with the base by an integral hinge. The base includes a rotatable wafer support, and the lid includes a universal frame and a pin holder attachment spaced inwardly from the frame. Only two contact pins are formed in a wafer-facing surface of the pin holder attachment. The contact pins are manually aligned with and contact two points on a wafer when the lid is closed against the base. A method for holding a wafer for plating is provided using the disclosed holder apparatus.
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