Invention Grant
- Patent Title: Clam shell two-pin wafer holder for metal plating
- Patent Title (中): 蛤壳式双针晶圆座用于金属电镀
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Application No.: US13653181Application Date: 2012-10-16
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Publication No.: US09087867B2Publication Date: 2015-07-21
- Inventor: Kennith Ray Law , Rodney Allen Biskeborn
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Frank Cimino
- Main IPC: C25B9/04
- IPC: C25B9/04 ; C25B9/06 ; C25D17/06 ; C25D7/12 ; H01L21/687 ; C25D17/00

Abstract:
A clam shell wafer holder includes a base and a lid pivotally connected with the base by an integral hinge. The base includes a rotatable wafer support, and the lid includes a universal frame and a pin holder attachment spaced inwardly from the frame. Only two contact pins are formed in a wafer-facing surface of the pin holder attachment. The contact pins are manually aligned with and contact two points on a wafer when the lid is closed against the base. A method for holding a wafer for plating is provided using the disclosed holder apparatus.
Public/Granted literature
- US20130037413A1 CLAM SHELL TWO-PIN WAFER HOLDER FOR METAL PLATING Public/Granted day:2013-02-14
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