Invention Grant
- Patent Title: Nonvolatile memory devices and methods of fabricating the same
- Patent Title (中): 非易失性存储器件及其制造方法
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Application No.: US13946307Application Date: 2013-07-19
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Publication No.: US09087871B2Publication Date: 2015-07-21
- Inventor: Kil-Ho Lee , Ki-Joon Kim , Se-Woong Park
- Applicant: Kil-Ho Lee , Ki-Joon Kim , Se-Woong Park
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2012-0085784 20120806
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/762 ; H01L21/768 ; H01L27/22 ; H01L43/08

Abstract:
Nonvolatile memory devices and methods of fabricating the same, include, forming a transistor in a first region of a substrate, forming a contact which is connected to the transistor, forming an information storage portion, which is disposed two-dimensionally, in a second region of the substrate, sequentially forming a stop film and an interlayer insulating film which cover the contact and the information storage portion, forming a first trench, which exposes the stop film, on the contact, and forming a second trench which extends through the stop film to expose the contact, wherein a bottom surface of the first trench is lower than a bottom surface of the information storage portion.
Public/Granted literature
- US20140038385A1 NONVOLATILE MEMORY DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2014-02-06
Information query
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