Invention Grant
US09087897B1 Semiconductor structures with pair(s) of vertical field effect transistors, each pair having a shared source/drain region and methods of forming the structures
有权
具有一对垂直场效应晶体管的半导体结构,每对具有共享源极/漏极区域以及形成该结构的方法
- Patent Title: Semiconductor structures with pair(s) of vertical field effect transistors, each pair having a shared source/drain region and methods of forming the structures
- Patent Title (中): 具有一对垂直场效应晶体管的半导体结构,每对具有共享源极/漏极区域以及形成该结构的方法
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Application No.: US14169318Application Date: 2014-01-31
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Publication No.: US09087897B1Publication Date: 2015-07-21
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L29/72
- IPC: H01L29/72 ; H01L29/78 ; H01L29/66

Abstract:
Disclosed are semiconductor structures and methods of forming the structures. The structures each comprise a pair of vertical FETs. Specifically, a U-shaped semiconductor body has a horizontal section and two vertical sections. The horizontal section comprises a shared source/drain region for first and second vertical FETs. Each vertical section comprises a channel region and a source/drain region above the channel region for a corresponding one the vertical FETs. In one semiconductor structure, each vertical section has a gate wrapped around the channel region. In another semiconductor structure, each vertical section has a front gate positioned adjacent to the inner vertical surface at the channel region and a back gate positioned adjacent to the outer vertical surface at the channel region. In any case, a contact, which is electrically isolated from the gates, extends vertically to the shared source/drain region in the horizontal section. Optionally, metal strap(s) electrically connect the pair of vertical FETs to adjacent pair(s).
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