Invention Grant
- Patent Title: FinFETs with strained well regions
- Patent Title (中): 具有紧张井区的FinFET
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Application No.: US13779015Application Date: 2013-02-27
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Publication No.: US09087902B2Publication Date: 2015-07-21
- Inventor: Yi-Jing Lee , Cheng-Hsien Wu , Chih-Hsin Ko , Clement Hsingjen Wann
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L29/78 ; H01L29/66 ; H01L29/10 ; H01L29/417 ; H01L29/778 ; H01L29/165 ; H01L29/43 ; H01L29/06

Abstract:
A device includes a substrate and insulation regions over a portion of the substrate. A first semiconductor region is between the insulation regions and having a first conduction band. A second semiconductor region is over and adjoining the first semiconductor region, wherein the second semiconductor region includes an upper portion higher than top surfaces of the insulation regions to form a semiconductor fin. The semiconductor fin has a tensile strain and has a second conduction band lower than the first conduction band. A third semiconductor region is over and adjoining a top surface and sidewalls of the semiconductor fin, wherein the third semiconductor region has a third conduction band higher than the second conduction band.
Public/Granted literature
- US20140239402A1 FinFETs with Strained Well Regions Public/Granted day:2014-08-28
Information query
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