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US09087923B2 Monolithic compound semiconductor structure 有权
单片化合物半导体结构

Monolithic compound semiconductor structure
Abstract:
A monolithic compound semiconductor structure is disclosed. The monolithic compound semiconductor structure comprises a substrate, an n-type FET epitaxial structure, an n-type etching-stop layer, a p-type insertion layer, and an npn HBT epitaxial structure, and it can be used to form an FET, an HBT, or a thyristor.
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