Invention Grant
US09087983B2 Self-aligned process for fabricating voltage-gated MRAM 有权
用于制造电压门控MRAM的自对准工艺

  • Patent Title: Self-aligned process for fabricating voltage-gated MRAM
  • Patent Title (中): 用于制造电压门控MRAM的自对准工艺
  • Application No.: US14188699
    Application Date: 2014-02-25
  • Publication No.: US09087983B2
    Publication Date: 2015-07-21
  • Inventor: Yimin Guo
  • Applicant: Yimin Guo
  • Main IPC: G11C11/00
  • IPC: G11C11/00 H01L43/12 H01L27/22
Self-aligned process for fabricating voltage-gated MRAM
Abstract:
A STT-MRAM comprises apparatus and a method of manufacturing a spin-torque magnetoresistive memory and a plurality of a three-terminal magnetoresistive memory element having a voltage-gated recording. A bit line is coupled to the memory element through an upper electrode provided on the top surface of a reference layer, a select CMOS is coupled to the recording layer of the memory element through a middle second electrode and a VIA and a digital line is coupled to a voltage gate which is insulated from the recording layer by a dielectric layer and is used to adjust the switching write current. The fabrication includes formation of bottom digital line, formation of memory cell & VIA connection, formation of top bit line. Dual photolithography patterning and hard mask etch are used to form a small memory pillar. Ion implantation is used to convert a buried dielectric VIA into an electrical conducting path between middle memory cell and underneath CMOS device.
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