Invention Grant
- Patent Title: Self-aligned process for fabricating voltage-gated MRAM
- Patent Title (中): 用于制造电压门控MRAM的自对准工艺
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Application No.: US14188699Application Date: 2014-02-25
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Publication No.: US09087983B2Publication Date: 2015-07-21
- Inventor: Yimin Guo
- Applicant: Yimin Guo
- Main IPC: G11C11/00
- IPC: G11C11/00 ; H01L43/12 ; H01L27/22

Abstract:
A STT-MRAM comprises apparatus and a method of manufacturing a spin-torque magnetoresistive memory and a plurality of a three-terminal magnetoresistive memory element having a voltage-gated recording. A bit line is coupled to the memory element through an upper electrode provided on the top surface of a reference layer, a select CMOS is coupled to the recording layer of the memory element through a middle second electrode and a VIA and a digital line is coupled to a voltage gate which is insulated from the recording layer by a dielectric layer and is used to adjust the switching write current. The fabrication includes formation of bottom digital line, formation of memory cell & VIA connection, formation of top bit line. Dual photolithography patterning and hard mask etch are used to form a small memory pillar. Ion implantation is used to convert a buried dielectric VIA into an electrical conducting path between middle memory cell and underneath CMOS device.
Public/Granted literature
- US20140241047A1 SELF-ALIGNED PROCESS FOR FABRICATING VOLTAGE-GATED MRAM Public/Granted day:2014-08-28
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