Invention Grant
US09088017B2 Gas reclaiming system and method 有权
气体回收系统及方法

Gas reclaiming system and method
Abstract:
A gas reclaiming system is disclosed. The gas reclaiming system includes a getter device adapted to receive mixed gases and separate the mixed gases into at least one gas of interest and constituent gases. A recirculation loop is disposed in fluid communication with the getter device and adapted to receive the at least one gas of interest from the getter device. A gas reclaiming method is also disclosed.
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