Invention Grant
- Patent Title: Electronic device, method of manufacturing the same, and oscillator
- Patent Title (中): 电子装置及其制造方法以及振荡器
-
Application No.: US14018686Application Date: 2013-09-05
-
Publication No.: US09089055B2Publication Date: 2015-07-21
- Inventor: Yoji Kitano , Norio Okuyama
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-199160 20120911
- Main IPC: H01L23/053
- IPC: H01L23/053 ; H05K5/02 ; B81B7/00
Abstract:
An electronic device includes a substrate, a cavity part formed above the substrate with a functional device placed therein, a coating structure that defines the cavity part, and the coating structure has a first surrounding wall formed around the cavity part above the substrate, a second surrounding wall formed around the cavity part above the first surrounding wall, a coating layer that defines an upper surface of the cavity part, wherein the second surrounding wall is located inside the first surrounding wall in a plan view.
Public/Granted literature
- US20140070900A1 ELECTRONIC DEVICE, METHOD OF MANUFACTURING THE SAME, AND OSCILLATOR Public/Granted day:2014-03-13
Information query
IPC分类:
