Invention Grant
- Patent Title: Sputtering magnetron assembly
- Patent Title (中): 溅射磁控管组件
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Application No.: US13266012Application Date: 2011-02-18
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Publication No.: US09093251B2Publication Date: 2015-07-28
- Inventor: Premendra
- Applicant: Premendra
- Applicant Address: BE Brussels
- Assignee: TOYOTA MOTOR EUROPE NV/SA
- Current Assignee: TOYOTA MOTOR EUROPE NV/SA
- Current Assignee Address: BE Brussels
- Agency: Kenyon & Kenyon LLP
- International Application: PCT/EP2011/052472 WO 20110218
- International Announcement: WO2012/110105 WO 20120823
- Main IPC: H01J37/34
- IPC: H01J37/34

Abstract:
The present invention concerns a sputtering magnetron assembly comprising a rotatable tubular target cathode and a magnetic field generating device installed within the tubular target cathode. At least part of the magnetic field generating device is configured to move within the tubular target cathode so as to maintain within a predetermined range a magnetic field strength at an outer surface of the tubular target cathode during erosion of said outer surface. The present invention also relates to a physical vapour deposition method using such a sputtering magnetron assembly.
Public/Granted literature
- US20120211352A1 SPUTTERING MAGNETRON ASSEMBLY Public/Granted day:2012-08-23
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