Invention Grant
- Patent Title: Methods for selectively coating three-dimensional features on a substrate
- Patent Title (中): 在衬底上选择性地涂覆三维特征的方法
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Application No.: US13942150Application Date: 2013-07-15
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Publication No.: US09093323B2Publication Date: 2015-07-28
- Inventor: David Xuan-Qi Wang , Mehrdad M. Moslehi , Somnath Nag
- Applicant: Solexel, Inc.
- Applicant Address: US CA Milpitas
- Assignee: Solexel, Inc.
- Current Assignee: Solexel, Inc.
- Current Assignee Address: US CA Milpitas
- Agent John Wood
- Main IPC: B44C1/22
- IPC: B44C1/22 ; H01L21/66 ; H01L21/67 ; H01L31/0352 ; H01L31/18 ; H01L31/20 ; H05K3/04 ; H05K3/12 ; H01L21/02 ; H05K1/02 ; H05K3/20 ; H01L31/046
Abstract:
Methods here disclosed provide for selectively coating three-dimensional features on a substrate while avoiding liquid coating material wicking into micro cavities on the substrates. The steps include depositing a semiconductor layer on a sacrificial layer formed on a template and selectively etching the sacrificial layer. Then, the steps include releasing the semiconductor layer from the template and coating three-dimensional features on the substrate using a liquid coating step for applying a liquid coating material to a pre-determined surface of the three-dimensional features on the substrate.
Public/Granted literature
- US20140127834A1 METHODS FOR LIQUID TRANSER COATING OF THREE-DIMENSIONAL SUBSTRATES Public/Granted day:2014-05-08
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