Invention Grant
US09093419B2 Semiconductor device containing MIM capacitor and fabrication method
有权
包含MIM电容器的半导体器件及其制造方法
- Patent Title: Semiconductor device containing MIM capacitor and fabrication method
- Patent Title (中): 包含MIM电容器的半导体器件及其制造方法
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Application No.: US14177570Application Date: 2014-02-11
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Publication No.: US09093419B2Publication Date: 2015-07-28
- Inventor: Zhongshan Hong
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201310113290 20130402
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L49/02 ; H01L23/522

Abstract:
A semiconductor device containing an MIM capacitor and its fabrication method are provided. A metal-insulator-metal (MIM) capacitor is formed on a first interlayer dielectric layer covering a substrate. The MIM capacitor includes a bottom electrode layer and a top electrode layer that are isolated from and laterally staggered with one another. A second interlayer dielectric layer is formed to cover both the MIM capacitor and the first interlayer dielectric layer. A first conductive plug and a second conductive plug are formed each passing through the second interlayer dielectric layer. The first conductive plug contacts a sidewall and a surface portion of the top electrode layer of the MIM capacitor and the second conductive plug contacts a sidewall and a surface portion of the bottom electrode layer of the MIM capacitor.
Public/Granted literature
- US20140291805A1 SEMICONDUCTOR DEVICE CONTAINING MIM CAPACITOR AND FABRICATION METHOD Public/Granted day:2014-10-02
Information query
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