Invention Grant
- Patent Title: Semiconductor heterostructure field effect transistor and method for making thereof
- Patent Title (中): 半导体异质结场效应晶体管及其制造方法
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Application No.: US14089613Application Date: 2013-11-25
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Publication No.: US09093516B2Publication Date: 2015-07-28
- Inventor: Mohammad Ali Pourghaderi , Bart Soree
- Applicant: IMEC
- Applicant Address: BE Leuven
- Assignee: IMEC
- Current Assignee: IMEC
- Current Assignee Address: BE Leuven
- Agency: Knobbe Martens Olson & Bear, LLP
- Priority: EP13155745 20130219
- Main IPC: H01L31/0336
- IPC: H01L31/0336 ; H01L29/78 ; H01L29/66 ; H01L29/778 ; H01L29/06 ; H01L29/205

Abstract:
A heterostructure field effect transistor is provided comprising a semiconductor wire comprising in its longitudinal direction a source and a drain region, a channel region in between the source and drain region and in its transversal direction for the source region, a source core region and a source shell region disposed around the source core region, the source shell region having in its transversal direction for the drain region, a drain core region and a drain shell region disposed around the drain core region, the drain shell region having in its transversal direction for the channel region, a channel core region and a channel shell region disposed around the channel core region; wherein the thickness of the channel shell region is smaller than the thickness of the source shell region and is smaller than the thickness of the drain shell region.
Public/Granted literature
- US20140158985A1 SEMICONDUCTOR HETEROSTRUCTURE FIELD EFFECT TRANSISTOR AND METHOD FOR MAKING THEREOF Public/Granted day:2014-06-12
Information query
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