Invention Grant
US09093578B2 Solid-state image sensor, method of manufacturing the same, and camera 有权
固态图像传感器,其制造方法和相机

Solid-state image sensor, method of manufacturing the same, and camera
Abstract:
A method of manufacturing a solid-state image sensor includes preparing a structure including a photoelectric converter formed in an image sensing region and a pad electrode formed in a pad region, forming a first organic film including a first organic portion arranged in the image sensing region of the structure in the image sensing region and the pad region, forming a color filter layer on the first organic portion, forming a second organic film in the image sensing region and the pad region, forming an inorganic film in the image sensing region and the pad region, and etching the inorganic film, the second organic film, and the first organic film so as to form an opening which communicates with the pad electrode.
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