Invention Grant
- Patent Title: Solid-state image sensor, method of manufacturing the same, and camera
- Patent Title (中): 固态图像传感器,其制造方法和相机
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Application No.: US13911339Application Date: 2013-06-06
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Publication No.: US09093578B2Publication Date: 2015-07-28
- Inventor: Masaki Kurihara , Daisuke Shimoyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2012-136304 20120615
- Main IPC: H04N5/335
- IPC: H04N5/335 ; H04N5/228 ; H01L27/00 ; H01L31/062 ; H01L31/0232 ; H01L27/146

Abstract:
A method of manufacturing a solid-state image sensor includes preparing a structure including a photoelectric converter formed in an image sensing region and a pad electrode formed in a pad region, forming a first organic film including a first organic portion arranged in the image sensing region of the structure in the image sensing region and the pad region, forming a color filter layer on the first organic portion, forming a second organic film in the image sensing region and the pad region, forming an inorganic film in the image sensing region and the pad region, and etching the inorganic film, the second organic film, and the first organic film so as to form an opening which communicates with the pad electrode.
Public/Granted literature
- US20130335590A1 SOLID-STATE IMAGE SENSOR, METHOD OF MANUFACTURING THE SAME, AND CAMERA Public/Granted day:2013-12-19
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