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US09093642B2 Non-volatile memory device and method of manufacturing the same 有权
非易失性存储器件及其制造方法

Non-volatile memory device and method of manufacturing the same
Abstract:
According to one embodiment, dry etching is performed so that an upper-layer wiring material layer, a memory-layer constituting layer, and an interlayer insulating film are processed to form a pattern including a line-and-space pattern extending in a second direction and a dummy pattern connecting line patterns constituting the line-and-space pattern in a memory cell formation region and an upper-layer wiring hookup region. Then, the dummy pattern is removed.
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