Invention Grant
- Patent Title: Non-volatile memory device and method of manufacturing the same
- Patent Title (中): 非易失性存储器件及其制造方法
-
Application No.: US13945342Application Date: 2013-07-18
-
Publication No.: US09093642B2Publication Date: 2015-07-28
- Inventor: Mutsumi Okajima
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-046924 20130308
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; G11C13/00

Abstract:
According to one embodiment, dry etching is performed so that an upper-layer wiring material layer, a memory-layer constituting layer, and an interlayer insulating film are processed to form a pattern including a line-and-space pattern extending in a second direction and a dummy pattern connecting line patterns constituting the line-and-space pattern in a memory cell formation region and an upper-layer wiring hookup region. Then, the dummy pattern is removed.
Public/Granted literature
- US20140209849A1 NON-VOLATILE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-07-31
Information query
IPC分类: