Invention Grant
- Patent Title: Multilayer wiring board and method for manufacturing the same
- Patent Title (中): 多层布线板及其制造方法
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Application No.: US14079381Application Date: 2013-11-13
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Publication No.: US09095071B2Publication Date: 2015-07-28
- Inventor: Yoshiyuki Fukami , Toshinori Omori , Katsushi Mikuni , Noriko Kon
- Applicant: Kabushiki Kaisha Nihon Micronics
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee: KABUSHIKI KAISHA NIHON MICRONICS
- Current Assignee Address: JP Tokyo
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: JP2012-254337 20121120
- Main IPC: H05K1/16
- IPC: H05K1/16 ; H01L21/48 ; H01L23/498 ; G01R31/28 ; H05K1/02 ; G01R1/073 ; G01R3/00

Abstract:
Provided is a method for manufacturing a multi-layer wiring board and the multi-layer wiring board that are capable of suppressing variation in resistance values. The method according to the present invention is the method for manufacturing a multi-layer wiring board. The method includes forming a resistor thin film, measuring resistance distribution of the resistor thin film, calculating resistor width adjustment rates of the plurality of resistors according to the resistance distribution, forming a pattern of a protective film on the resistor thin film, in which the pattern of the protective pattern has pattern width according to the resistor width adjustment rate, forming a pattern of a plating film on the resistor thin film at a position exposed from the protective film, and etching the resistor thin film at a position exposed from the plating film and the protective film so as to pattern the resistor thin film.
Public/Granted literature
- US20140138139A1 MULTILAYER WIRING BOARD AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2014-05-22
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