Invention Grant
- Patent Title: Piezoelectric array employing integrated MEMS switches
- Patent Title (中): 采用集成MEMS开关的压电阵列
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Application No.: US13768820Application Date: 2013-02-15
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Publication No.: US09096422B2Publication Date: 2015-08-04
- Inventor: Arman Hajati
- Applicant: Arman Hajati
- Applicant Address: US NH Lebanon
- Assignee: FUJIFILM DIMATIX, INC.
- Current Assignee: FUJIFILM DIMATIX, INC.
- Current Assignee Address: US NH Lebanon
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L41/08
- IPC: H01L41/08 ; A61B8/00 ; B81B7/00 ; B81B7/02 ; H01L41/09

Abstract:
Switchable micromachined transducer arrays are described where a MicroElectroMechanical Systems (MEMS) switch, or relay, is monolithically integrated with a transducer element. In embodiments, the MEMS switch is implemented in the same substrate as the transducer array to implement one or more logic, addressing, or transducer control function. In embodiments, each transducer element of an array is a piezoelectric element coupled to at least one MEMS switch to provide element-level addressing within the array. In certain embodiments the same piezoelectric material employed in the transducer is utilized in the MEMS switch.
Public/Granted literature
- US20140232241A1 PIEZOELECTRIC ARRAY EMPLOYING INTEGRATED MEMS SWITCHES Public/Granted day:2014-08-21
Information query
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