Invention Grant
- Patent Title: Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof
- Patent Title (中): 组装微机电类型的容性声换能器及其包装
-
Application No.: US14312307Application Date: 2014-06-23
-
Publication No.: US09096424B2Publication Date: 2015-08-04
- Inventor: Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: EP09425179 20090511
- Main IPC: H04R25/00
- IPC: H04R25/00 ; B81C1/00 ; B81B7/00 ; H04R1/28 ; H04R19/00 ; H04R19/04 ; B81B3/00 ; H04R1/04 ; H04R1/06 ; H04R1/08

Abstract:
A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.
Public/Granted literature
- US20140299949A1 ASSEMBLY OF A CAPACITIVE ACOUSTIC TRANSDUCER OF THE MICROELECTROMECHANICAL TYPE AND PACKAGE THEREOF Public/Granted day:2014-10-09
Information query