Invention Grant
US09096931B2 Deposition valve assembly and method of heating the same 有权
沉积阀组件及其加热方法

Deposition valve assembly and method of heating the same
Abstract:
A valve assembly including a mounting block having a first surface, a plurality of valves connected to the mounting block first surface, at least one fluid line connecting the plurality of valves spaced apart from the mounting block first surface, a heating element spaced apart from the at least one fluid line and located within a first insulating layer, and wherein the first insulating layer extends less than completely around the at least one fluid line.
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