Invention Grant
- Patent Title: MEMS device with improved spring system
- Patent Title (中): 具有改进弹簧系统的MEMS装置
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Application No.: US13361261Application Date: 2012-01-30
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Publication No.: US09097524B2Publication Date: 2015-08-04
- Inventor: Joseph Seeger , Ozan Anac
- Applicant: Joseph Seeger , Ozan Anac
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Sawyer Law Group, P.C.
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/5755

Abstract:
A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.
Public/Granted literature
- US20120125101A1 MEMS DEVICE WITH IMPROVED SPRING SYSTEM Public/Granted day:2012-05-24
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