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US09097612B2 Integrated wavefront sensor and profilometer 有权
集成波前传感器和轮廓仪

Integrated wavefront sensor and profilometer
Abstract:
An instrument for measuring aspheric optical surfaces includes both an optical wavefront sensor and a single-point optical profilometer. The optical wavefront sensor measures surface height variations throughout one or more areas of an aspheric test surface. The single-point profilometer measures surface height variations along one or more traces on the aspheric test surface. At least one of the traces intersects at least one of the areas, and respective spatial frames of reference for the traces and areas are relatively adapted to each other by minimizing differences between points of nominal coincidence between the areas and traces.
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