Invention Grant
- Patent Title: Integrated wavefront sensor and profilometer
- Patent Title (中): 集成波前传感器和轮廓仪
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Application No.: US14087363Application Date: 2013-11-22
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Publication No.: US09097612B2Publication Date: 2015-08-04
- Inventor: Andrew Kulawiec , Paul Murphy , Jon Fleig
- Applicant: QED Technologies International, Inc.
- Applicant Address: US IL Aurora
- Assignee: QED Technologies International, Inc.
- Current Assignee: QED Technologies International, Inc.
- Current Assignee Address: US IL Aurora
- Agent Thomas E Omholt; Thomas B Ryan
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01M11/00 ; G01M11/02

Abstract:
An instrument for measuring aspheric optical surfaces includes both an optical wavefront sensor and a single-point optical profilometer. The optical wavefront sensor measures surface height variations throughout one or more areas of an aspheric test surface. The single-point profilometer measures surface height variations along one or more traces on the aspheric test surface. At least one of the traces intersects at least one of the areas, and respective spatial frames of reference for the traces and areas are relatively adapted to each other by minimizing differences between points of nominal coincidence between the areas and traces.
Public/Granted literature
- US20140152999A1 INTEGRATED WAVEFRONT SENSOR AND PROFILOMETER Public/Granted day:2014-06-05
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