Invention Grant
US09097897B2 Optical deflector including narrow piezoelectric sensor element between torsion bar and piezoelectric actuator 有权
光学偏转器包括扭杆和压电执行器之间的窄压电传感器元件

Optical deflector including narrow piezoelectric sensor element between torsion bar and piezoelectric actuator
Abstract:
In an optical deflector including a mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror having an end coupled to an outer circumference of the mirror, a pair of piezoelectric actuators arranged between the support frame and the torsion bar, and a piezoelectric sensor inserted between the torsion bar and one of the piezoelectric actuators, the piezoelectric sensor includes at least one piezoelectric sensor element having a width being smaller than two-fifths of a width of the one of the piezoelectric actuators and being arranged at a wide portion within two-fifths of the width from an inner end of the one of the piezoelectric actuators.
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