Invention Grant
- Patent Title: Optical deflector including narrow piezoelectric sensor element between torsion bar and piezoelectric actuator
- Patent Title (中): 光学偏转器包括扭杆和压电执行器之间的窄压电传感器元件
-
Application No.: US14023126Application Date: 2013-09-10
-
Publication No.: US09097897B2Publication Date: 2015-08-04
- Inventor: Takanori Aimono
- Applicant: STANLEY ELECTRIC CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: STANLEY ELECTRIC CO., LTD.
- Current Assignee: STANLEY ELECTRIC CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Holtz, Holtz, Goodman & Chick PC
- Priority: JP2012-199364 20120911
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; H01L41/08

Abstract:
In an optical deflector including a mirror, a support frame surrounding the mirror, at least one torsion bar arranged along an axis of the mirror having an end coupled to an outer circumference of the mirror, a pair of piezoelectric actuators arranged between the support frame and the torsion bar, and a piezoelectric sensor inserted between the torsion bar and one of the piezoelectric actuators, the piezoelectric sensor includes at least one piezoelectric sensor element having a width being smaller than two-fifths of a width of the one of the piezoelectric actuators and being arranged at a wide portion within two-fifths of the width from an inner end of the one of the piezoelectric actuators.
Public/Granted literature
Information query