Invention Grant
US09097971B2 Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern 有权
化合物,自由基聚合引发剂,化合物的制备方法,聚合物,抗蚀剂组合物和形成抗蚀剂图案的方法

Compound, radical polymerization initiator, method for producing compound, polymer, resist composition, and method for forming resist pattern
Abstract:
A compound represented by formula (I). In the formula, R1 represents a hydrocarbon group of 1 to 10 carbon atoms; Z represents a hydrocarbon group of 1 to 10 carbon atoms or a cyano group; provided that R1 and Z may be mutually bonded to form a ring; X represents a divalent linking group having any one selected from —O—C(═O)—, —NH—C(═O)— and —NH—C(═NH)— on a terminal that comes into contact with Q; p represents an integer of 1 to 3; Q represents a hydrocarbon group having a valency of (p+1), provided that, when p is 1, Q may be a single bond; R2 represents a single bond, an alkylene group which may have a substituent or an arylene group which may have a substituent; q represents 0 or 1; r represents an integer of 0 to 8; and A+ represents a metal cation or an organic cation.
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