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US09097975B2 Double patterning by PTD and NTD process 有权
通过PTD和NTD过程进行双重图案化

Double patterning by PTD and NTD process
Abstract:
A method of manufacturing using a double patterning method is provided. The double patterning method uses a first developer and a second developer that are different. For example, the first developer may be a positive tone developer for a positive photoresist while the second developer may be a negative tone developer for the positive photoresist. Photoresists having a photoactive compound are also provided that may be useful in double patterning methods. The resulting double patterning results, wherein a dimension of a variable first dense pattern is larger than a dimension of a variable second dense pattern.
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