Invention Grant
- Patent Title: Double patterning by PTD and NTD process
- Patent Title (中): 通过PTD和NTD过程进行双重图案化
-
Application No.: US14484455Application Date: 2014-09-12
-
Publication No.: US09097975B2Publication Date: 2015-08-04
- Inventor: Chin Cheng Yang
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Alston & Bird LLP
- Main IPC: G03F7/26
- IPC: G03F7/26 ; G03F7/20 ; G03F7/30

Abstract:
A method of manufacturing using a double patterning method is provided. The double patterning method uses a first developer and a second developer that are different. For example, the first developer may be a positive tone developer for a positive photoresist while the second developer may be a negative tone developer for the positive photoresist. Photoresists having a photoactive compound are also provided that may be useful in double patterning methods. The resulting double patterning results, wherein a dimension of a variable first dense pattern is larger than a dimension of a variable second dense pattern.
Public/Granted literature
- US20140377708A1 DOUBLE PATTERNING BY PTD AND NTD PROCESS Public/Granted day:2014-12-25
Information query
IPC分类: