Invention Grant
US09099219B2 Oxide evaporation material, transparent conducting film, and solar cell
有权
氧化物蒸发材料,透明导电膜和太阳能电池
- Patent Title: Oxide evaporation material, transparent conducting film, and solar cell
- Patent Title (中): 氧化物蒸发材料,透明导电膜和太阳能电池
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Application No.: US13967628Application Date: 2013-08-15
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Publication No.: US09099219B2Publication Date: 2015-08-04
- Inventor: Yoshiyuki Abe , Riichiro Wake , Masakazu Kuwahara , Kentaro Sogabe , Azusa Oshiro , Hisaki Yada
- Applicant: SUMITOMO METAL MINING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee: SUMITOMO METAL MINING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2009-271447 20091130; JP2010-016289 20100128
- Main IPC: H01B1/08
- IPC: H01B1/08 ; H01L31/02 ; H01L31/0224 ; C23C14/34 ; C23C30/00 ; C04B35/01 ; C23C14/08 ; H01L31/0749 ; H01L31/18

Abstract:
An oxide evaporation material according to the present invention includes a sintered body containing indium oxide as a main component thereof and cerium with a Ce/In atomic ratio of 0.001 to 0.110. The L* value in the CIE 1976 color space is 62 to 95. The oxide evaporation material with the L* value of 62 to 95 has an optimal oxygen amount. Accordingly, even when a small amount of an oxygen gas is introduced into a film-formation vacuum chamber, a transparent conducting film having a low resistance and a high transmittance in the visible to near-infrared region is formed by vacuum deposition methods. Since the amount of the oxygen gas introduced is small, the difference in composition between the film and the evaporation material is made small. This reduces the variations in composition and characteristics among films formed in large quantities.
Public/Granted literature
- US20130327395A1 OXIDE EVAPORATION MATERIAL, TRANSPARENT CONDUCTING FILM, AND SOLAR CELL Public/Granted day:2013-12-12
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