Invention Grant
- Patent Title: Fabrication for electroplating thick metal pads
- Patent Title (中): 电镀厚金属焊盘的制造
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Application No.: US12949353Application Date: 2010-11-18
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Publication No.: US09099344B2Publication Date: 2015-08-04
- Inventor: Clifford F. Knollenberg , Mark R. Teepe , Christopher Chua
- Applicant: Clifford F. Knollenberg , Mark R. Teepe , Christopher Chua
- Applicant Address: US CA Palo Alto
- Assignee: Palo Alto Research Center Incorporated
- Current Assignee: Palo Alto Research Center Incorporated
- Current Assignee Address: US CA Palo Alto
- Agency: Marger Johnson & McCollom PC
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L33/62

Abstract:
A method of electroplating includes forming a seed region to be electroplated on a first portion of a substrate, forming a ground plane on a second portion of a substrate, electrically isolating the ground plane from the seed region, electroplating the region, wherein electroplating includes causing the ground plane and the region to make electrical connection, and then removing the ground plane region on the second portion of the substrate, but not removing the electrical isolation. This creates a structure having a substrate, a passivation layer on the substrate, and at least one electroplated, metal region on the substrate such that there is contiguous contact between the metal region and the passivation layer. And, after an additional flip-chip assembly to a bond pad/heat sinking chip, results in a device having a bond pad chip having bond pads, solder beads formed on the bond pads, and a component connected to the bond pads by the solder beads. Wherein, the component has a substrate, a passivation layer on the substrate, and at least one electroplated, metal region on the substrate such that there is contiguous contact between the metal region and the passivation layer.
Public/Granted literature
- US20110062486A1 FABRICATION FOR ELECTROPLATING THICK METAL PADS Public/Granted day:2011-03-17
Information query
IPC分类: