Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices and method of fabricating the same
- Patent Title (中): 三维半导体存储器件及其制造方法
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Application No.: US13415388Application Date: 2012-03-08
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Publication No.: US09099347B2Publication Date: 2015-08-04
- Inventor: Jang-Gn Yun , Kwang Soo Seol , Youngwoo Park
- Applicant: Jang-Gn Yun , Kwang Soo Seol , Youngwoo Park
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2011-0042706 20110504
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/115

Abstract:
Provided are three-dimensional semiconductor memory devices and methods of fabricating the same. The device may include an electrode structure extending in a first direction and including electrodes and insulating patterns which are alternately and repeatedly stacked on a substrate, and vertical active patterns penetrating the electrode structure. At least an uppermost electrode of the electrodes is divided into a plurality of physically isolated segments arranged in the first direction. The segments of the uppermost electrode are electrically connected to each other.
Public/Granted literature
- US20120280299A1 Three-Dimensional Semiconductor Memory Devices and Method of Fabricating the Same Public/Granted day:2012-11-08
Information query
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