Invention Grant
- Patent Title: Micropipe-free silicon carbide and related method of manufacture
- Patent Title (中): 无碳化硅和相关制造方法
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Application No.: US11854864Application Date: 2007-09-13
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Publication No.: US09099377B2Publication Date: 2015-08-04
- Inventor: Cem Basceri , Yuri Khlebnikov , Igor Khlebnikov , Cengiz Balkas , Murat N. Silan , Hudson McD. Hobgood , Calvin H. Carter, Jr. , Vijay Balakrishna , Robert T. Leonard , Adrian R. Powell , Valeri T. Tsvetkov , Jason R. Jenny
- Applicant: Cem Basceri , Yuri Khlebnikov , Igor Khlebnikov , Cengiz Balkas , Murat N. Silan , Hudson McD. Hobgood , Calvin H. Carter, Jr. , Vijay Balakrishna , Robert T. Leonard , Adrian R. Powell , Valeri T. Tsvetkov , Jason R. Jenny
- Applicant Address: US NC Durham
- Assignee: Cree, Inc.
- Current Assignee: Cree, Inc.
- Current Assignee Address: US NC Durham
- Agency: Moore & Van Allen PLLC
- Agent Christopher J. Knors
- Main IPC: C30B23/00
- IPC: C30B23/00 ; C30B29/36 ; C30B29/40 ; H01L29/16 ; H01L21/02

Abstract:
Micropipe-free, single crystal, silicon carbide (SiC) and related methods of manufacture are disclosed. The SiC is grown by placing a source material and seed material on a seed holder in a reaction crucible of the sublimation system, wherein constituent components of the sublimation system including the source material, reaction crucible, and seed holder are substantially free from unintentional impurities. By controlling growth temperature, growth pressure, SiC sublimation flux and composition, and a temperature gradient between the source material and the seed material or the SiC crystal growing on the seed material during the PVT process, micropipe-inducing process instabilities are eliminated and micropipe-free SiC crystal is grown on the seed material.
Public/Granted literature
- US20080083366A1 MICROPIPE-FREE SILICON CARBIDE AND RELATED METHOD OF MANUFACTURE Public/Granted day:2008-04-10
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