Invention Grant
- Patent Title: Dual tray carrier unit
- Patent Title (中): 双托盘托架单元
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Application No.: US13259343Application Date: 2011-09-23
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Publication No.: US09099509B2Publication Date: 2015-08-04
- Inventor: Foon M. Chan , King W. Cheung , Ka C. Leung , Chi Y. C. Chan , Carolus Truyens , Erik J. J. M. DeBlock , Jimmy J. D. Vermeulen
- Applicant: Foon M. Chan , King W. Cheung , Ka C. Leung , Chi Y. C. Chan , Carolus Truyens , Erik J. J. M. DeBlock , Jimmy J. D. Vermeulen
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- International Application: PCT/US2011/020166 WO 20110923
- International Announcement: WO2011/084972 WO 20110714
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; B65G37/00

Abstract:
A tray carrier system having a tray loading position, a tray off-loading position, and four parallel rails extending from the tray loading position to the tray off-loading position. A tray carrier platform is disposed on each rail, where each tray carrier platform is configured to move along the rail on which it is disposed between the tray loading position and the tray off-loading position. Each tray carrier platform includes a carriage for engaging the rail, swing arms attached to the carriage, retaining pieces attached to the swing arms for selectively retaining and releasing a tray, and means for moving the swing arms between an open position and a closed position. The retaining pieces retain the tray at a tray level when the swing arms are in the closed position, and release the tray and are disposed entirely below the tray level when the swing arms are in the open position. Two of the tray carrier platforms form a first tray carrier unit, and the other two tray carrier platforms form a second tray carrier unit. The first tray carrier unit is capable of passing underneath a tray carried by the second tray carrier unit in the closed position when the first tray carrier unit is in the open position.
Public/Granted literature
- US20120090495A1 Dual Tray Carrier Unit Public/Granted day:2012-04-19
Information query
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