Invention Grant
US09099512B2 Article including a device wafer reversibly mountable to a carrier substrate
有权
本文包括可逆地安装到载体衬底的器件晶片
- Patent Title: Article including a device wafer reversibly mountable to a carrier substrate
- Patent Title (中): 本文包括可逆地安装到载体衬底的器件晶片
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Application No.: US12951530Application Date: 2010-11-22
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Publication No.: US09099512B2Publication Date: 2015-08-04
- Inventor: Tony D. Flaim , Jeremy McCutcheon
- Applicant: Tony D. Flaim , Jeremy McCutcheon
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/06 ; H01L21/683

Abstract:
New temporary bonding methods and articles formed from those methods are provided. The methods comprise bonding a device wafer to a carrier wafer or substrate only at their outer perimeters in order to assist in protecting the device wafer and its device sites during subsequent processing and handling. The edge bonds formed by this method are chemically and thermally resistant, but can also be softened, dissolved, or mechanically disrupted to allow the wafers to be easily separated with very low forces and at or near room temperature at the appropriate stage in the fabrication process.
Public/Granted literature
- US20110069467A1 METHOD FOR REVERSIBLY MOUNTING A DEVICE WAFER TO A CARRIER SUBSTRATE Public/Granted day:2011-03-24
Information query
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