Invention Grant
US09099533B2 Semiconductor device with distinct multiple-patterned conductive tracks on a same level
有权
具有相同级别的不同多重图案化导电轨迹的半导体器件
- Patent Title: Semiconductor device with distinct multiple-patterned conductive tracks on a same level
- Patent Title (中): 具有相同级别的不同多重图案化导电轨迹的半导体器件
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Application No.: US13933488Application Date: 2013-07-02
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Publication No.: US09099533B2Publication Date: 2015-08-04
- Inventor: David H. Allen , Douglas M. Dewanz , David P. Paulsen , John E. Sheets, II
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans LLP
- Agent Robert R. Williams
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/768 ; H01L21/66 ; H01L23/528
Abstract:
A multiple-patterned semiconductor device and a method of manufacture are provided. The semiconductor device includes a conductive layer. The conductive layer includes conductive tracks which may be defined by photomasks. The conductive tracks may have quality characteristics. Distinct quality characteristics of distinct conductive tracks may be compared. Based on the comparison, signals and supply voltage may be routed on particular conductive tracks.
Public/Granted literature
- US20150008585A1 MULTIPLE-PATTERNED SEMICONDUCTOR DEVICE Public/Granted day:2015-01-08
Information query
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