Invention Grant
US09099538B2 Conductor with a plurality of vertical extensions for a 3D device
有权
具有用于3D装置的多个垂直延伸部的导体
- Patent Title: Conductor with a plurality of vertical extensions for a 3D device
- Patent Title (中): 具有用于3D装置的多个垂直延伸部的导体
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Application No.: US14029305Application Date: 2013-09-17
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Publication No.: US09099538B2Publication Date: 2015-08-04
- Inventor: Yen-Hao Shih , Hang-Ting Lue
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/768 ; H01L23/48
Abstract:
Conductors in a 3D circuit that include horizontal lines with a plurality of vertical extensions in high aspect ratio trenches can be formed using a two-step etching procedure. The procedure can comprise providing a substrate having a plurality of spaced-apart stacks; forming a pattern of vertical pillars in a body of conductor material between stacks; and forming a pattern of horizontal lines in the body of conductor material over stacks, the horizontal lines connecting vertical pillars in the pattern of vertical pillars. The body of conductor material can be deposited over the plurality of spaced-apart stacks. A first etch process can be used to form the pattern of vertical pillars. A second etch process can be used to form the pattern of horizontal lines. The conductors can be used as word lines or as bit lines in 3D memory.
Public/Granted literature
- US20150076668A1 CONDUCTOR WITH A PLURALITY OF VERTICAL EXTENSIONS FOR A 3D DEVICE Public/Granted day:2015-03-19
Information query
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