- Patent Title: Transistors from vertical stacking of carbon nanotube thin films
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Application No.: US13971342Application Date: 2013-08-20
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Publication No.: US09099542B2Publication Date: 2015-08-04
- Inventor: Aaron D. Franklin , Joshua T. Smith , George S. Tulevski
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/08 ; H01L29/775 ; H01L29/66 ; B82Y10/00 ; B82Y15/00 ; B82Y40/00 ; H01L51/00 ; H01L51/05

Abstract:
A carbon nanotube field-effect transistor is disclosed. The carbon nanotube field-effect transistor includes a first carbon nanotube film, a first gate layer coupled to the first carbon nanotube film and a second carbon nanotube film coupled to the first gate layer opposite the first gate layer. The first gate layer is configured to influence an electric field within the first carbon nanotube film as well as to influence an electric field of the second carbon nanotube film. At least one of a source contact and a drain contact are coupled to the first and second carbon nanotube film and are separated from the first gate layer by an underlap region.
Public/Granted literature
- US20140138625A1 TRANSISTORS FROM VERTICAL STACKING OF CARBON NANOTUBE THIN FILMS Public/Granted day:2014-05-22
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