Invention Grant
- Patent Title: Tunnel field effect transistor
- Patent Title (中): 隧道场效应晶体管
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Application No.: US13925119Application Date: 2013-06-24
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Publication No.: US09099555B2Publication Date: 2015-08-04
- Inventor: Cyrille Le Royer , Costin Anghel
- Applicant: Commissariat á l'énergie atomique et aux énergies alternatives
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1255979 20120625
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L29/66 ; H01L29/739 ; H01L29/08 ; H01L29/51 ; H01L29/165

Abstract:
A TFET transistor includes an intrinsic channel, source and drain extension regions, source and drain conductive regions, a gate surmounting the channel and laid out such that an end of the channel is not covered by the gate. The transistor includes a first arrangement for forming an isolating space between the sides of the gate and the source conductive region including a first and a second dielectric spacer. The extension region has a thickness strictly greater than that of the channel such that the extension region has an increased thickness opposite the gate dielectric layer. The first face of the first spacer is in contact with the side of the gate followed by the side of the gate dielectric layer such that the first face covers the whole of the side of the layer.
Public/Granted literature
- US20140035040A1 TUNNEL FIELD EFFECT TRANSISTOR Public/Granted day:2014-02-06
Information query
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