Invention Grant
US09099558B2 Fin FET structure with dual-stress spacers and method for forming the same
有权
具有双应力间隔件的翅片FET结构及其形成方法
- Patent Title: Fin FET structure with dual-stress spacers and method for forming the same
- Patent Title (中): 具有双应力间隔件的翅片FET结构及其形成方法
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Application No.: US13653329Application Date: 2012-10-16
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Publication No.: US09099558B2Publication Date: 2015-08-04
- Inventor: Wayne Bao
- Applicant: Wayne Bao
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP.
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201110453483 20111229
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/20 ; H01L21/8238 ; H01L21/84 ; H01L27/092 ; H01L27/12 ; H01L29/66

Abstract:
This application discloses a Fin FET structure and a method for forming the same. In the Fin FET structure, there are lower stress spacers disposed over the lower portion of the fin's opposite sidewalls, asserting one stress type to suppress the carrier mobility; there are also upper stress spacers disposed over the upper portion of the fin's opposite sidewalls, asserting an opposite stress type to increase the carrier mobility. Therefore, the leakage current in the fin FET is reduced and the device performance is improved. In the method, the stress spacers are formed by depositing stress layers and etching back the stress layers, where stress types and magnitudes are controllable, resulting in a simple process.
Public/Granted literature
- US20130168748A1 FIN FET STRUCTURE WITH DUAL-STRESS SPACERS AND METHOD FOR FORMING THE SAME Public/Granted day:2013-07-04
Information query
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