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US09099581B2 Re-entrant mirror photodetector with waveguide mode focusing 有权
具有波导模式聚焦的反射镜式光电探测器

Re-entrant mirror photodetector with waveguide mode focusing
Abstract:
A photonic integrated circuit (I/C) includes a focusing sidewall or in-plane surface that redirects and focuses light from a waveguide to a photodetector structure. The focusing includes redirecting an optical signal to a width smaller than a width of the waveguide. The focusing of the light allows the photodetector structure to be outside a waveguide defined by parallel oxide structures. With the photodetector structure outside the waveguide, the contacts can be placed closer together, which reduces contact resistance.
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