Invention Grant
US09099635B2 Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device
有权
超声波换能器元件芯片,探头,电子仪器和超声波诊断装置
- Patent Title: Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device
- Patent Title (中): 超声波换能器元件芯片,探头,电子仪器和超声波诊断装置
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Application No.: US13770115Application Date: 2013-02-19
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Publication No.: US09099635B2Publication Date: 2015-08-04
- Inventor: Tomoaki Nakamura , Jiro Tsuruno , Kanechika Kiyose
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Global IP Counselors, LLP
- Priority: JP2012-038402 20120224
- Main IPC: H01L41/053
- IPC: H01L41/053 ; B06B1/06

Abstract:
An ultrasonic transducer element chip includes a substrate, a plurality of ultrasonic transducer elements and a plate-shaped member. The substrate includes a partition wall section defining a plurality of openings arranged in an array pattern. A wall thickness of the partition wall section is smaller than a wall height of partition wall section. Each of the ultrasonic transducer elements is provided in each of the openings. The plate-shaped member is fixed on a surface of the substrate opposite to a surface of the substrate on which the ultrasonic transducer elements are provided. The plate-shaped member covers at least one of the openings in a plan view seen along a thickness direction of the substrate.
Public/Granted literature
- US20130223191A1 ULTRASONIC TRANSDUCER ELEMENT CHIP, PROBE, ELECTRONIC INSTRUMENT, AND ULTRASONIC DIAGNOSTIC DEVICE Public/Granted day:2013-08-29
Information query
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