Invention Grant
- Patent Title: Method of manufacturing switching filters and design structures
- Patent Title (中): 开关滤波器和设计结构的制造方法
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Application No.: US13358172Application Date: 2012-01-25
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Publication No.: US09099982B2Publication Date: 2015-08-04
- Inventor: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- Applicant: James W. Adkisson , Panglijen Candra , Thomas J. Dunbar , Jeffrey P. Gambino , Mark D. Jaffe , Anthony K. Stamper , Randy L. Wolf
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H03H3/08
- IPC: H03H3/08 ; H01L41/08 ; H03H9/64 ; H03H3/007 ; H03H9/02

Abstract:
Switchable and/or tunable filters, methods of manufacture and design structures are provided herein. The method of forming the filters includes forming at least one piezoelectric filter structure comprising a plurality of electrodes formed on a piezoelectric substrate. The method further includes forming a fixed electrode with a plurality of fingers on the piezoelectric substrate. The method further includes forming a moveable electrode with a plurality of fingers over the piezoelectric substrate. The method further includes forming actuators aligned with one or more of the plurality of fingers of the moveable electrode.
Public/Granted literature
- US20130187729A1 SWITCHABLE FILTERS AND DESIGN STRUCTURES Public/Granted day:2013-07-25
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