Invention Grant
- Patent Title: Cross-sectional dilation mode resonators
- Patent Title (中): 横截面扩张模式谐振器
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Application No.: US13295970Application Date: 2011-11-14
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Publication No.: US09099986B2Publication Date: 2015-08-04
- Inventor: Chengjie Zuo , Changhan Yun , Chi Shun Lo , Wesley Nathaniel Allen , Mario Francisco Velez , Jonghae Kim
- Applicant: Chengjie Zuo , Changhan Yun , Chi Shun Lo , Wesley Nathaniel Allen , Mario Francisco Velez , Jonghae Kim
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: H01L41/053
- IPC: H01L41/053 ; H03H9/46 ; H03H9/24 ; H03H9/02

Abstract:
Electromechanical systems dilation mode resonator (DMR) structures are disclosed. The DMR includes a first electrode layer, a second electrode layer, and a piezoelectric layer formed of a piezoelectric material. The piezoelectric layer has dimensions including a lateral distance (D), in a plane of an X axis and a Y axis perpendicular to the X axis, and a thickness (T), along a Z axis perpendicular to the X axis and the Y axis. A numerical ratio of the thickness and the lateral distance, T/D, is configured to provide a mode of vibration of the piezoelectric layer with displacement along the Z axis and along the plane of the X axis and the Y axis responsive to a signal provided to one or more of the electrodes. Ladder filter circuits can be constructed with DMRs as series and/or shunt elements, and the resonators can have spiral configurations.
Public/Granted literature
- US20130083044A1 CROSS-SECTIONAL DILATION MODE RESONATORS Public/Granted day:2013-04-04
Information query
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