Invention Grant
- Patent Title: Expanding device and method for manufacturing components
- Patent Title (中): 扩大装置和制造部件的方法
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Application No.: US13707644Application Date: 2012-12-07
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Publication No.: US09101085B2Publication Date: 2015-08-04
- Inventor: Miyuki Mizukami , Naohiro Yamada
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2011-273018 20111214
- Main IPC: H05K13/00
- IPC: H05K13/00 ; H01L21/67 ; H01L21/02 ; H01L21/683

Abstract:
In an expanding device that can more effectively expand an adhesive tape in its wafer-attached region and can pick up components on the adhesive tape with high accuracy, a central first portion of an adhesive tape, including a portion with a wafer attached thereto, is laid on a top surface of a heating table, a non-heated ring is disposed to surround an outer peripheral edge of the heating table, a heat insulation is laid on an upper surface of the non-heated ring, a second portion of the adhesive tape located outwardly of the first portion thereof is located on or above the insulation, a third portion of the adhesive tape located outwardly of the second portion is held by a holder, and the holder is movable up and down relative to the heating table and the non-heated ring by a drive unit.
Public/Granted literature
- US20130153132A1 EXPANDING DEVICE AND METHOD FOR MANUFACTURING COMPONENTS Public/Granted day:2013-06-20
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