Invention Grant
US09101885B2 Silica-like membrane for separating gas and the method for forming the same 有权
用于分离气体的二氧化硅膜及其形成方法

Silica-like membrane for separating gas and the method for forming the same
Abstract:
The present invention discloses a silica-like membrane for separating gas, which is modified from poly(dimethylsiloxane) (PDMS) membrane by an atmospheric pressure high temperature plasma torch (APHTPT). Furthermore, the present invention of the separating gas silica-like membrane with an inorganic/organic interface structure which has both the gas flux of the organic membrane and also the gas selectivity of the inorganic membrane.
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