Invention Grant
US09101956B2 Mask processing using films with spatially selective birefringence reduction
有权
使用具有空间选择性双折射降低的膜的掩模处理
- Patent Title: Mask processing using films with spatially selective birefringence reduction
- Patent Title (中): 使用具有空间选择性双折射降低的膜的掩模处理
-
Application No.: US13703549Application Date: 2011-06-29
-
Publication No.: US09101956B2Publication Date: 2015-08-11
- Inventor: William Ward Merrill , Douglas S. Dunn
- Applicant: William Ward Merrill , Douglas S. Dunn
- Applicant Address: US MN Saint Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN Saint Paul
- Agent Yufeng Dong; Gregory D. Allen
- International Application: PCT/US2011/042368 WO 20110629
- International Announcement: WO2012/012177 WO 20120126
- Main IPC: G02B5/32
- IPC: G02B5/32 ; B05D5/06 ; G02B5/28 ; G02B5/30 ; G11B20/12 ; B42D25/391

Abstract:
Certain patternable reflective films are used as masks to make other patterned articles, and one or more initial masks can be used to pattern the patternable reflective films. An exemplary patternable reflective film has an absorption characteristic suitable to, upon exposure to a radiant beam, absorptively heat a portion of the film by an amount sufficient to change a first reflective characteristic to a different second reflective characteristic. The change from the first to the second reflective characteristic is attributable to a change in birefringence of one or more layers or materials of the patternable film. In a related article, a mask is attached to such a patternable reflective film. The mask may have opaque portions and light-transmissive portions. Further, the mask may have light-transmissive portions with structures such as focusing elements and/or prismatic elements.
Public/Granted literature
- US20130094084A1 MASK PROCESSING USING FILMS WITH SPATIALLY SELECTIVE BIREFRINGENCE REDUCTION Public/Granted day:2013-04-18
Information query