Invention Grant
- Patent Title: Liquid ejecting head and method for producing the same
- Patent Title (中): 液体喷头及其制造方法
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Application No.: US13857341Application Date: 2013-04-05
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Publication No.: US09102145B2Publication Date: 2015-08-11
- Inventor: Masahiko Kubota , Ryoji Kanri , Akihiko Okano , Atsushi Hiramoto , Masataka Sakurai , Yoshiyuki Fukumoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2012-089179 20120410
- Main IPC: B41J2/04
- IPC: B41J2/04 ; G01D15/00 ; G11B5/127 ; B41J2/14 ; B41J2/16

Abstract:
A method for producing a liquid ejecting head of the present invention includes the steps of: forming an etching stop layer on a portion corresponding to a region in which an independent supply port is formed, on a first face of a substrate; conducting dry etching treatment for the substrate from a second face side until the etched portion reaches the etching stop layer; and removing the etching stop layer by isotropic etching to form the independent supply port, after having conducted the dry etching treatment, wherein the isotropic etching is conducted in such a state that a side etching stopper portion having etching resistance to the isotropic etching is formed in the side face perimeter of the etching stop layer.
Public/Granted literature
- US20130265368A1 LIQUID EJECTING HEAD AND METHOD FOR PRODUCING THE SAME Public/Granted day:2013-10-10
Information query
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