Invention Grant
- Patent Title: Ag—Au—Pd ternary alloy bonding wire
- Patent Title (中): Ag-Au-Pd三元合金接合线
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Application No.: US13496327Application Date: 2011-11-01
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Publication No.: US09103001B2Publication Date: 2015-08-11
- Inventor: Jun Chiba , Satoshi Teshima , Tasuku Kobayashi , Yuki Antoku
- Applicant: Jun Chiba , Satoshi Teshima , Tasuku Kobayashi , Yuki Antoku
- Applicant Address: JP Tokyo
- Assignee: TANAKA DENSHI KOGYO K.K.
- Current Assignee: TANAKA DENSHI KOGYO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2011-027860 20110210
- International Application: PCT/JP2011/075160 WO 20111101
- International Announcement: WO2012/108082 WO 20120816
- Main IPC: C22C5/06
- IPC: C22C5/06 ; B21C37/00 ; H01L23/49 ; H01L23/00

Abstract:
An Ag—Au—Pd ternary alloy bonding wire for semiconductor devices made from 4-10 mass % of gold having a purity of 99.999% or higher, 2-5 mass % of palladium having a purity of 99.99% or higher, and remaining mass % of silver (Ag) having a purity of 99.999% or higher; and this wire contains 15-70 mass ppm of oxidizing non-noble metallic elements, and is thermally annealed before being continuously drawn through dies, and is thermally tempered after being continuously drawn through the dies, and this wire is useful for ball bonding in a nitrogen atmosphere; Ag2Al and a Pd rich layer produced in the interface between the Ag—Au—Pd ternary alloy wire and an aluminum pad suppress the corrosion development between the Ag2Al intermetallic compound layer and the wire.
Public/Granted literature
- US20120263624A1 Ag-Au-Pd TERNARY ALLOY BONDING WIRE Public/Granted day:2012-10-18
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