Invention Grant
US09105546B2 Imaging systems with backside illuminated near infrared imaging pixels
有权
具有背面照明的近红外成像像素的成像系统
- Patent Title: Imaging systems with backside illuminated near infrared imaging pixels
- Patent Title (中): 具有背面照明的近红外成像像素的成像系统
-
Application No.: US13954844Application Date: 2013-07-30
-
Publication No.: US09105546B2Publication Date: 2015-08-11
- Inventor: Sergey Velichko , Gennadiy Agranov
- Applicant: Semiconductor Components Industries, LLC
- Applicant Address: US AZ Phoenix
- Assignee: Semiconductor Components Industries, LLC
- Current Assignee: Semiconductor Components Industries, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Treyz Law Group
- Agent Joseph F. Guihan; Michael H. Lyons
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L27/146

Abstract:
An imaging system may include an image sensor having backside illuminated near infrared image sensor pixels. Each pixel may be formed in a graded epitaxial substrate layer such as a graded n-type epitaxial layer. Each pixel may be separated from an adjacent pixel by an isolation trench formed in the graded epitaxial layer. The isolation trench may be a continuous isolation trench or may be formed from a combined front side isolation trench and backside isolation trench that are separated by a wall structure. A buried front side reflector may be provided that reflects light such as infrared light that has passed through a pixel back into the pixel, thereby effectively doubling the silicon absorption depth of the pixels.
Public/Granted literature
- US20140077323A1 IMAGING SYSTEMS WITH BACKSIDE ILLUMINATED NEAR INFRARED IMAGING PIXELS Public/Granted day:2014-03-20
Information query
IPC分类: