Invention Grant
US09105609B2 Oxide-based semiconductor non-linear element having gate electrode electrically connected to source or drain electrode
有权
具有与源电极或漏电极电连接的栅电极的氧化物基半导体非线性元件
- Patent Title: Oxide-based semiconductor non-linear element having gate electrode electrically connected to source or drain electrode
- Patent Title (中): 具有与源电极或漏电极电连接的栅电极的氧化物基半导体非线性元件
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Application No.: US12912296Application Date: 2010-10-26
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Publication No.: US09105609B2Publication Date: 2015-08-11
- Inventor: Shunpei Yamazaki
- Applicant: Shunpei Yamazaki
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2009-251186 20091030
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/423 ; H01L27/12 ; H01L29/739 ; H01L29/22

Abstract:
A non-linear element (e.g., a diode) with small reverse saturation current is provided. A non-linear element includes a first electrode provided over a substrate, an oxide semiconductor film provided on and in contact with the first electrode, a second electrode provided on and in contact with the oxide semiconductor film, a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode, and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film with the gate insulating film interposed therebetween or a third electrode provided in contact with the gate insulating film and surrounding the second electrode. The third electrode is connected to the first electrode or the second electrode.
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