Invention Grant
- Patent Title: Method for enhancing channel strain
- Patent Title (中): 增强通道应变的方法
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Application No.: US14279689Application Date: 2014-05-16
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Publication No.: US09105664B2Publication Date: 2015-08-11
- Inventor: Ming-Lung Cheng , Yen-Chun Lin , Da-Wen Lin
- Applicant: Taiwan Semiconductor Manufacturing Company Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L21/8238 ; H01L21/84 ; H01L27/092 ; H01L27/12 ; H01L29/165 ; H01L29/78 ; H01L21/02

Abstract:
An apparatus includes a substrate having a strained channel region, a dielectric layer over the channel region, first and second conductive layers over the dielectric layer having a characteristic with a first value, and a strain-inducing conductive layer between the conductive layers having the characteristic with a second value different from the first value. A different aspect involves an apparatus that includes a substrate, first and second projections extending from the substrate, the first projection having a tensile-strained first channel region and the second projection having a compression-strained second channel region, and first and second gate structures engaging the first and second projections, respectively. The first gate structure includes a dielectric layer, first and second conductive layers over the dielectric layer, and a strain-inducing conductive layer between the conductive layers. The second gate structure includes a high-k dielectric layer adjacent the second channel region, and a metal layer.
Public/Granted literature
- US20140248751A1 METHOD AND APPARATUS FOR ENHANCING CHANNEL STRAIN Public/Granted day:2014-09-04
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