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US09105736B2 Three-dimensional nonvolatile memory devices including interposed floating gates 有权
三维非易失性存储器件包括插入的浮动栅极

Three-dimensional nonvolatile memory devices including interposed floating gates
Abstract:
Provided are three-dimensional nonvolatile memory devices and methods of fabricating the same. The memory devices include semiconductor pillars penetrating interlayer insulating layers and conductive layers alternately stacked on a substrate and electrically connected to the substrate and floating gates selectively interposed between the semiconductor pillars and the conductive layers. The floating gates are formed in recesses in the conductive layers.
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