Invention Grant
- Patent Title: Three-dimensional nonvolatile memory devices including interposed floating gates
- Patent Title (中): 三维非易失性存储器件包括插入的浮动栅极
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Application No.: US14164408Application Date: 2014-01-27
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Publication No.: US09105736B2Publication Date: 2015-08-11
- Inventor: Byoungkeun Son , Hansoo Kim , Jinho Kim , Kihyun Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec, P.A.
- Priority: KR10-2009-0023626 20090319
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8238 ; H01L29/788 ; H01L29/423 ; H01L29/78 ; H01L27/115

Abstract:
Provided are three-dimensional nonvolatile memory devices and methods of fabricating the same. The memory devices include semiconductor pillars penetrating interlayer insulating layers and conductive layers alternately stacked on a substrate and electrically connected to the substrate and floating gates selectively interposed between the semiconductor pillars and the conductive layers. The floating gates are formed in recesses in the conductive layers.
Public/Granted literature
- US20140138756A1 THREE-DIMENSIONAL NONVOLATILE MEMORY DEVICES INCLUDING INTERPOSED FLOATING GATES Public/Granted day:2014-05-22
Information query
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